Nanoelectromechanical systems (NEMS) based on atomically-thin tungsten diselenide (WSe₂), benefiting from the excellent material properties and the mechanical degree of freedom, offer an ideal platform for studying and exploiting dynamic strain engineering and cross-scale vibration coupling in two-dimensional (2D) crystals. However, such opportunity has remained largely unexplored for WSe₂ NEMS, impeding exploration of exquisite physical processes and realization of novel device functions. Here, we demonstrate dynamic coupling between atomic lattice vibration and nanomechanical resonances in few-layer WSe₂ NEMS. Using a custom-built setup capable of simultaneously detecting Raman and motional signals, we accomplish cross-scale mode coupling between the THz crystal phonon and MHz structural vibration, achieving GHz frequency tuning in the atomic lattice modes with a dynamic gauge factor of 61.9, the best among all 2D crystals reported to date. Our findings show that such 2D NEMS offer great promises for exploring cross-scale physics in atomically-thin semiconductors.

基于原子薄二硒化钨 （WSe₂） 的纳米机电系统 （NEMS） 受益于优异的材料性能和机械自由度，为研究和开发二维 （2D） 晶体中的动态应变工程和跨尺度振动耦合提供了理想的平台。然而，WSe₂ NEMS 的这种机会在很大程度上仍未得到探索，阻碍了对精致物理过程的探索和新颖设备功能的实现。在这里，我们演示了几层 WSe₂ NEMS 中原子晶格振动和纳米机械共振之间的动态耦合。使用能够同时检测拉曼和运动信号的定制装置，我们实现了太赫兹晶体声子和 MHz 结构振动之间的跨尺度模式耦合，在原子晶格模式下实现了 GHz 频率调谐，动态规范因子为 61.9，是迄今为止报道的所有 2D 晶体中最好的。我们的研究结果表明，这种 2D NEMS 为探索原子薄半导体中的跨尺度物理学提供了巨大的前景。